由于自吸性差、对气泡敏感等原因,单腔体压电泵在应用中受到限制,而多腔体结构是提高压电泵性能的有效途径。通过分析腔体容积与压力变化过程得出:双腔体串联压电泵只能采用串联驱动方式而不能采用并联驱动方式,双腔体并联压电泵只能采用并联驱动方式而不能采用串联驱动方式。制作双腔串联、并联压电泵样机并进行测试可以得出:串联压电泵在驱动电压200 V,频率152 Hz时,输出流量达到最大为1 150 ml/min;并联泵在压电驱动电压140 V,频率220 Hz时,输出流量达到最大为640 ml/min;因此多腔泵采用腔体串联结构能提高压电泵的工作效率,提高泵的工作性能。

The application of the single-chamber piezoelectric pump is limited in many fields,for it has self-priming performance and bubble tolerance. It is an efficient way to adopt a multi-chamber structure to enhance the performance of piezoelectric pumps. The analysis result on changing processes of the volume and pressure in the chamber of a pump shows that the double-chamber serial piezoelectric pump only can be driven by a tandem mode,and the double-chamber parallel piezoelectric pump only can be driven by a parallel mode,respectively. The experiment results indicate that the maximum flow of the double-chamber serial pump is 1150 ml/min in a sine wave voltage of 200 V and a frequency of 152 Hz,and that of double-chamber parallel pump is 640 ml/min in a sine wave voltage of 140 V and a frequency of 220 Hz.These data reported here show that the multi-chamber with a serial structure can enhance the efficiency and performance of pumps.