提出了一种高精度标定索累-巴比涅(Soleil-Babinet)补偿器的新方法。在光谱扫描法测量系统中,将多级半波片置于被测补偿器后,以半波片的延迟量为基准,高精度地标定出补偿器的延迟量所对应的测微丝杆位移。该方法利用光强透过率和波长的关系得到延迟量,避免了光强值直接测量法误差源多、精度不高的缺点;同时解决了光谱扫描法不易测量零级相位器件的问题。实验中以工作波长为633 nm的多级半波片为基准,对Soleil-Babinet补偿器进行标定。分析表明,该方法在确定延迟量为0和λ的位置时,精度可达0.45 nm;0~λ范围之间的延迟量最大测量误差仅为3.2 nm。

A novel method based on the scanning spectrum system is proposed to calibrate the compensator. One multiple-order half wave plate is added to be used as a benchmark of the retardation. Any retardation between 0 and λ can be measured in high precision. The method can avoid errors caused by the light intensity measuring method,and moreover it can measure the zero-order retardation which the scanning spectrum method hardly accomplished. In the experiment,a compensator is calibrated based on a multiple-order wave plate at 633 nm. It is demonstrated that the retardation measuring precision is 0.45 nm in 0 and λ while the maximum error is less than 3.2 nm between the two positions.