中国激光, 2009, 36 (11): 3055, 网络出版: 2009-11-11
环境气氛及气压对增透膜真空激光损伤的影响
Effects of Environments and Gas Pressures on Laser-Induced Damage of Anti-Reflection Films
薄膜 增透膜 环境气氛 激光损伤阈值 损伤形貌 thin films anti-reflection films 1-on-1 1-on-1 environments and gas pressures laser-induced damage threshold damage morphology
摘要
利用1-on-1损伤测试方法,测试了真空和空气、氧气、氮气、氦气环境下在波长为1064 nm处增透膜(ARF)的激光损伤阈值和损伤形貌。结果表明,真空环境下的损伤阈值明显低于大气环境下的损伤阈值,真空环境下的破斑形貌也与大气环境下的破斑形貌有显著差异。在真空环境下存入一定量的氧气、氮气和氦气后薄膜的损伤阈值都得到提高,但存入的气体的种类及气压不同,损伤阈值与破斑形貌也不尽相同。
Abstract
Laser damage threshold and damage morphology at the wavelength of 1064 nm are tested in vacuum,air,O2,N2,He2 environments by using 1-on-1 testing method. The results show that compared to normal atmospheric conditions,anti-reflection films(ARF) have a decreasing laser induced damage threshold under vacuum environments. The morphology of the damaged sites showed a particular difference under two conditions. In vacuum environment with a few O2,N2,He2,laser induced damage threshold of anti-reflection films increased. Different gas environments and gas pressure result in different laser induced damage thresholds and damage morphology.
凌秀兰, 李大伟, 赵元安, 李淑红, 邵建达, 范正修. 环境气氛及气压对增透膜真空激光损伤的影响[J]. 中国激光, 2009, 36(11): 3055. Ling Xiulan, Li Dawei, Zhao Yuan′an, Li Shuhong, Shao Jianda, Fan Zhengxiu. Effects of Environments and Gas Pressures on Laser-Induced Damage of Anti-Reflection Films[J]. Chinese Journal of Lasers, 2009, 36(11): 3055.