利用电场改变液滴透镜的面形得到非球面,并实时检测其面形和焦斑图像,在适当的时候用紫外光固化液滴制作具有良好光学性能的非球面微透镜。比较了非球面液滴微透镜在固化前后面形、焦斑的变化和对透镜性能的影响,讨论了液滴透镜在固化过程中变形的机理和相应的解决方法。用分辨率50 nm的光斑探针扫描仪精确测量了固化后的非球面微透镜的聚焦光斑,测得了光斑轴向分布曲线和均方根直径3.384 μm的聚焦光斑,经图像处理计算了透镜的点扩散函数和光学传递函数,评价了所制作的非球面微透镜的聚光和成像能力,并给出了透镜的实际成像图像,对于完善高品质非球面微透镜及其阵列的制作工艺具有重要意义。

Aspherical liquid microlens of ultra-violet(UV) curable polymer was fabricated by using electrostatic field and real-time measurement.It was investigated that the surface profile and focal spot of the aspherical liquid lens had distortions while UV curing.The surface profiles and the focal spots before and after curing were compared.The reasons why distortion happened,its influence on lens′s optical quality and how it can be solved were all discussed.Spot probe scanning microscope with 50 nm resolution was employed to accurately measure the focal spots of the aspherical microlens.The spots at different axis positions and focal spot with 0.384 μm diameter were achieved.The point spread function and optical transfer function of the aspherical microlens were calculated,and the actual imaging photographs were provided.So the imaging ability of the aspherical microlens can be evaluated and it′s important for perfecting the lens fabricating technology.