强激光与粒子束, 2009, 21 (7): 1032, 网络出版: 2009-12-02
大口径精密表面疵病的数字化检测系统
Digital detection system of surface defects for large aperture optical elements
摘要
根据散射光成像原理,采用大小两个视场来获取不同精度的暗背景下的亮疵病图像,设计了完整的数字化表面疵病检测系统。该系统采用多区域自适应阈值分割算法对图像进行分割,然后采用基于等价归并标记方法快速提取疵病的特征参数,最后利用BP神经网络对疵病进行分类。实验结果表明该方法既满足实时性需求,又取得了较好的分类检测效果。
Abstract
Based on the light defect images against the dark background in a scattering imaging system,a digital detection system of surface defects for large aperture optical elements has been presented.In the system,the image is segmented by a multi-area self-adaptive threshold segmentation method,then a pixel labeling method based on replacing arrays is adopted to extract defect features quickly,and at last the defects are classified through back-propagation neural networks.Experiment results show that the system can achieve real-time detection and classification.
范勇, 陈念年, 高玲玲, 贾渊, 王俊波, 程晓锋. 大口径精密表面疵病的数字化检测系统[J]. 强激光与粒子束, 2009, 21(7): 1032. Fan Yong, Chen Niannian, Gao Lingling, Jia Yuan, Wang Junbo, Cheng Xiaofeng. Digital detection system of surface defects for large aperture optical elements[J]. High Power Laser and Particle Beams, 2009, 21(7): 1032.