以丙醇锆作为前驱体,利用酸碱分步催化法制备了ZrO2溶胶,用粒度仪检测胶体粒度;用N2 吸脱附表征凝胶的结构;采用旋转镀膜法在K9基片上镀制单层ZrO2薄膜;用分光光度计和椭偏仪检测膜层的透过率、折射率及膜层厚度;用红外光谱仪检测胶体内部粒子间化学键状态。实验结果发现,在脉宽1 nm,波长1 064 nm时,采用此种胶体镀制的单层ZrO2膜层折射率达到1.74,单层膜损伤阈值为9.0 J/cm2,表明该方法集中了酸与碱两种催化方式的优点,一定程度上提高了膜层的光学性能。

A synthesis procedure of ZrO2 colloids derived from the acid-alkali two-step catalyzed hydrolysis was disclosed.The granularity and its distribution of the colloid particles were measured.Then a ZrO2 film was prepared by the spin-coating method on K9 glass.Physical properties of the thin film were characterized by ellipsometer,UV-Vis spectrophotometer,and Fourier transform infrared spectrometer.The refractive index of the coating with the two-step method was 1.74,and the laser damage threshold was 9.0 J/cm2 at 1 064 nm fundametal wavelength and 1 ns pulse duration.The measured and experimental results indicate that the two-step method have advantages over single step ones.