强激光与粒子束, 2009, 21 (10): 1476, 网络出版: 2009-12-02
Sc2O3替代层在532 nm高反膜中的应用
Sc2O3 substitution layer for application in 532 nm high refector films
替代层 高反膜 应力 激光损伤阈值 抛光 substitution layer high reflector film stress laser induced damage threshold polishing
摘要
将Sc2O3替代层引入到532 nm高反膜(HfO2/SiO2)n中,利用Sc2O3在盐酸中具有较好的溶解性这个特点,把膜层与基片脱离,以方便基片返修,缩短返修周期,降低成本。能量色散谱元素测试表明,脱离后Sc元素残留率为0。用Lamada900分光光度计、WykoNT1100轮廓仪和ZYGO干涉仪分别表征了替代层引入对高反膜的光谱、表面粗糙度和应力的影响,并测试了膜系在532 nm的激光损伤阈值的变化,结果表明Sc2O3替代层的引入对高反膜的性能几乎没有负面影响。
Abstract
Sc2O3 substitution layer is introduced to 532 nm high reflector(HR) of HfO2/SiO2.According to its solution in hydrochloric acid,when failure occurs,putting the optics into acid,following by the solution of Sc2O3 substitution layer,the whole films are romoved clearly,then the substrates can be repolished simply and reused,time and cost can be saved greatly,too.0% of Sc is detected by energy diffraction spectrum after acid soaking on BK7 substrates.Lamada900 spectrophotometer,optical interferometer and WykoNT1100 contourgraph are employed to characterize the transmittance,stress and surface morphology of the 532 nm HR films,and the laser induced damage thresholds of the films with 532 nm laser beam are measured before and after replacement by Sc2O3 .It shows that the influence is negligible.Scanning electron microscopy is employed to represent the damage morphology.The substrates on which films are swept are recoated with the same films,series characterization of the recoated films proves that they are excellent and can be used in the laser system.
刘光辉, 方明, 晋云霞, 张伟丽, 贺洪波, 范正修. Sc2O3替代层在532 nm高反膜中的应用[J]. 强激光与粒子束, 2009, 21(10): 1476. Liu Guanghui, Fang Ming, Jin Yunxia, Zhang Weili, He Hongbo, Fan Zhengxiu. Sc2O3 substitution layer for application in 532 nm high refector films[J]. High Power Laser and Particle Beams, 2009, 21(10): 1476.