光谱学与光谱分析, 2009, 29 (1): 268, 网络出版: 2009-12-09  

X光电子谱辅助Raman光谱表征N含量对非晶金刚石薄膜的结构影响

XPS and Raman Spectral Analysis of Nitrogenated Tetrahedral Amorphous Carbon (ta-C:N) Films with Different Nitrogen Content
作者单位
哈尔滨工业大学 复合材料与结构研究所,黑龙江 哈尔滨 150080
摘要
用过滤阴极真空电弧沉积系统制备掺N非晶金刚石(ta-C:N)薄膜,通过在阴极电弧区和沉积室同时通入N2气实现非晶金刚石薄膜的N原子掺杂,并通过控制N2气流速制备不同N原子含量的ta-C:N薄膜。用X射线光电子能谱(XPS)和Raman光谱分析N含量对ta-C:N薄膜微观结构的影响。XPS分析结果显示:当N2气流速从2 cm3·min-1 增加到20 cm3·min-1 时,薄膜中N原子含量从0.84 at.%增加到5.37 at.%,同时随薄膜中N原子含量的增加,XPS C(1s)芯能谱峰位呈现单调增加的趋势,XPS C(1s)芯能谱的半高峰宽也随着N含量的增加而逐渐变宽。在Raman光谱中,随N原子含量增加,G峰的位置从1 561.61 cm-1 升高到1 578.81 cm-1 。XPS C(1s)芯能谱和Raman光谱分析结果表明:随N含量的增加,XPS C(1s)芯能谱中sp2/sp3值和Raman光谱中I D/I G值均呈上升的趋势,两种结果都说明了随N原子含量增加,薄膜中sp2含量也增加,薄膜结构表现出石墨化倾向。
Abstract
Nitrogenated tetrahedral amorphous carbon (ta-C:N) films were prepared on the polished C—Si substrates by introducing highly pure nitrogen gas into the cathode region and the depositing chamber synchronously using filtered cathodic vacuum arc (FCVA) technology.The nitrogen content in the films was controlled by changing the flow rate of nitrogen gas.The configuration of ta-C:N films was investigated by means of X-ray photoelectron spectroscopy (XPS) and visible Raman spectroscopy.It was shown that the nitrogen content in the films increased from 0.84 at% to 5.37 at% monotonously when the nitrogen flow rate was varied from 2 sccm to 20 sccm.The peak position of C(1s) core level moved towards higher binding energy with the increase in nitrogen content.The shift of C(1s) peak position could be ascribed to the chemical bonding between carbon and nitrogen atoms even though more three-fold coordinated sp2 configuration as in graphite was formed when the films were doped with more nitrogen atoms.Additionally,the half width of C(1s) peak gradually was also broadened with increasing nitrogen content.In order to discover clearly the changing regularities of the microstructure of the films,the XPS C(1s) spectra and Raman spectra were deconvoluted using a Gaussian-Lorentzian mixed lineshape.It was shown that the tetrahedral hybridization component was still dominant even though the ratio of sp2/sp3 obtained from C(1s) spectra rose with the increase in nitrogen content.The Raman measurements demonstrated that thEg peak position shifted towards higher frequency from 1 561 to 1 578 cm-1 and the ratio of I D/I G also rose with the increase in nitrogen content.Both results indicated that thEgraphitizing tendency could occur with the increase in nitrogen content in the films.

陈旺寿, 朱嘉琦, 韩杰才, 田桂, 檀满林. X光电子谱辅助Raman光谱表征N含量对非晶金刚石薄膜的结构影响[J]. 光谱学与光谱分析, 2009, 29(1): 268. CHEN Wang-shou, ZHU Jia-qi, HAN Jie-cai, TIAN Gui, TAN Man-lin. XPS and Raman Spectral Analysis of Nitrogenated Tetrahedral Amorphous Carbon (ta-C:N) Films with Different Nitrogen Content[J]. Spectroscopy and Spectral Analysis, 2009, 29(1): 268.

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