设计了一种快速自动测试平面反射光栅相对衍射效率的新型系统。它采用连续光源照明,运用双联光栅光谱仪的结构型式,以N沟道增强型场效应管阵列(线阵NMOS)作为光电接收器件。运用光栅光谱仪的相关原理,对系统的测试原理进行了理论分析;并对光学系统进行了像质分析。分析得出,系统装置结构紧凑,电子学系统简化;不存在保证两光栅光谱仪的波长扫描同步问题,具有很好的波长重复性,精度易于保证;较之以往文献中的自动化方案制造成本降低,且操作简便,工作效率提高。研究结果表明:该测试仪工作光谱范围为190-1 100 nm,覆盖了大多数常用光栅的应用波长范围;且系统光谱分辨率小于3 nm,完全满足设计要求,是一种经济可行的方案。

A new-style system that automatically measures the diffraction efficiency of plane reflection grating was designed.The continuous illuminant was adopted for illumination,the duplex grating spectrograph structure was applied,and the linear array NMOS was the receiving component.Wielding relevant principle of the grating spectrograph,theoretical analysis principle was carried out for the testing system.Integrating the aberration theory of geometrical optics,the image quality of this optics system was analyzed.Analysis indicated that the systematic device structure is compact,and electronics system is simplified.The system does not have the problem about wavelength sweep synchronization of the two grating spectrographs,and its wavelength repeatability is very good.So the precision is easy to guarantee.Compared with the former automated scheme,the production cost is reduced,moreover it is easy to operate,and the working efficiency is enhanced.The study showed that this automatic measurement instrument system features a spectral range of 190-1 100 nm and resolution is less than 3 nm,which entirely satisfies the design request.It is an economical and feasible plan.