激光与光电子学进展, 2009, 46 (12): 38, 网络出版: 2009-12-17
等离子体MEMS 红外光源研究进展
Research Developments in Plasmonic MEMS Infrared Light Source
光学器件 金属/电介质光子晶体 二维金属亚波长孔阵列 表面等离子体 黑体辐射 optical device metal/dielectric photonic crystal two-dimensional metallic subwavelength hole array surface plasmon blackbody radiation
摘要
利用金属/电介质光子晶体(MDPC)对黑体热辐射光谱有增强透射和滤波的剪裁特性,制成能够发射出高性能、可调谐窄带相干光的等离子体微机电系统(MEMS)红外光源。其工作波长可选择性、工艺简单、成本低和MEMS 化等优点使其在生物、医学和**等领域得到广泛的应用。对该器件的结构与材料选择、工作机理、工艺流程及性能表征和研究进展进行了详细的综述,对其在微型非色散红外(NDIR)气体传感系统中的应用前景进行了展望。
Abstract
The plasmonic microelectromechanical systems (MEMS) infrared light sources,which can emit high performance,tunable narrowband,and coherent light are fabricated by using tailor-made properties of metal/dielectric photonic crystals (MDPC) which can enhance the blackbody radiation spectrum transmission and filtering. The advantages of infrared light source like alternative work wavelength,simple process,low-cost and MEMS systematization bring it a wide application in biological,medical and military fields. The structure,material selection,working mechanism,technologic process,performance characterization and research progress of the device are summarized in detail,and the application prospect for miniature non-dispersive infrared (NDIR) gas sensing system is viewed.
肖功利, 姚翔, 纪新明, 周嘉, 包宗明, 黄宜平. 等离子体MEMS 红外光源研究进展[J]. 激光与光电子学进展, 2009, 46(12): 38. Xiao Gongli, Yao Xiang, Ji Xinming, Zhou Jia, Bao Zongming, Huang Yiping. Research Developments in Plasmonic MEMS Infrared Light Source[J]. Laser & Optoelectronics Progress, 2009, 46(12): 38.
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