中国激光, 2009, 36 (s2): 53, 网络出版: 2009-12-30
离轴抛物面镜加工技术
Machining of Off-Axis Parabolic Mirror
光学制造 抛物面镜 超精密磨削 离轴 数控抛光 optical fabrication parabolic mirror fine grinding off-axis computer controlled optical surfacing
摘要
介绍离轴抛物面镜通常的几种加工流程和适用范围。详细介绍了基于超精密磨削技术和小工具数控抛光技术加工离轴抛物面镜的加工过程。着重介绍超精密磨削加工离轴抛物面镜的设备、加工原理,分析了其中误差的产生来源和工艺参数的选择。简要介绍了小工具数控抛光(CCOS)加工离轴抛物面镜和离轴抛物面镜的干涉检测。通过分析一块160 mm的离轴抛物面镜的参数和加工量确定了使用该加工过程。介绍了加工使用的主要参数;通过加工达到面形精度PV值0.2 μm。实验结果表明,采用超精密磨削技术和小工具数控抛光技术加工离轴抛物面镜是一种行之有效的加工方法。
Abstract
There are several methods for machining different kinds of off-axis parabolic mirrors. A progress based on fine grinding and computer controlled optical surfacing (CCOS) are presented in this article. Machine and grinding principle of fine grinding are introduced,also the error source and choosing the parameters for grinding are analyzed. CCOS for polishing off-axis parabolic mirror and optical testing it with interferometer are briefly introduced. An experiment on a parabolic mirror of 160 mm diameter is carried out and the obtained surface contour is 0.2 μm (perk-to-valley). The results of experiment show that fine grinding combined with CCOS is an effective machining method for off-axis parabolic mirror.
王健, 郭隐彪, 雷向阳, 许乔, 陈贤华, 王哲, 侯晶. 离轴抛物面镜加工技术[J]. 中国激光, 2009, 36(s2): 53. Wang Jian, Guo Yinbiao, Lei Xiangyang, Xu Qiao, Chen Xianhua, Wang Zhe, Hou Jing. Machining of Off-Axis Parabolic Mirror[J]. Chinese Journal of Lasers, 2009, 36(s2): 53.