中国激光, 2009, 36 (s2): 178, 网络出版: 2009-12-30
同步移相干涉仪偏振移相量的标定方法
Calibration for Phase-Shifting Polarizer Array in the Simultaneous Phase-Shifting Interferometer
摘要
同步移相干涉技术在同一时刻于不同空间位置,采集相互之间具有一定移相步长的干涉图,通过对移相干涉图的瞬态采集,实现动态测量。为了保证空间移相的精度,提出了一种定量标定同步移相空间偏振移相量的方法。在偏振移相式的同步移相干涉装置的基础上,采用了压电陶瓷(PZT)移相以及索累-巴比涅(Soleil-Babinet)补偿器移相两种方案,可得到相邻干涉图之间的相位差以及对应偏振片的方位角偏差,实现定量标定同步移相干涉仪的偏振移相量。实验结果表明,偏振移相阵列的平均方位角偏差均小于1°,能满足同步移相干涉实验对移相精度的要求。
Abstract
Simultaneous phase-shifting technology is used to capture several interferograms with certain phase intervals in different spacial positions at the same time. It can be applied to dynamic measurement because of its simultaneous interferograms-capturing characteristic. In order to guarantee the precision of the spacial phase-shifting,a method for calibrating the phase-shifting values of the polarizer array is proposed to fulfill the need. Based on the simultaneous phase-shifting interferometer,two methods by use of PZT and Soleil-Babinet compensator are utilized to obtain the phase differences of the neighbouring interferograms and the transmission direction differences of the corresponding polarizers. The experimental results indicate the average transmission direction error of the phase-shifting polarizer array is less than 1°,which can guarantee phase-shifting precision in the simultaneous phase-shifting interferometry.
尹嘉懿, 徐晨, 苏俊宏, 陈磊. 同步移相干涉仪偏振移相量的标定方法[J]. 中国激光, 2009, 36(s2): 178. Yin Jiayi, Xu Chen, Su Junhong, Chen Lei. Calibration for Phase-Shifting Polarizer Array in the Simultaneous Phase-Shifting Interferometer[J]. Chinese Journal of Lasers, 2009, 36(s2): 178.