介绍了利用光学相干层析技术(OCT)实现光学表面间距测量的方法。通过采用近红外宽带光源,结合迈克尔逊干涉仪和外差探测技术,建立了一套光纤型光学相干层析系统,并利用这套系统实现了对盖玻片堆快速(500 Hz)、高灵敏度(6.7 μm)、高精度(约2.07 μm)、非接触式的光学表面间距测量,取得了较好的实验结果。该方法采用了光纤化的结构设计,使得系统紧凑、灵活,作为现有光学表面间距测量方法的补充,将在光学材料检测、光学加工、光学装校等领域具有良好的应用前景。

This paper describes the distance measurement of optical surface based on optical coherence tomography (OCT). A single-mode fiber-designed OCT system is developed which consists of a near infrared light source,a Michelson′s interferometer and optical heterodyne detection. Distance testing experiment of range cover glasses is carried out by using this OCT system. The result shows this measurement system has the features of high speed(500 Hz),high sensitivity(6.7 μm),high precision(about 2.07 μm),and it is a non-contact type. The designed fiber system is compact and flexible,and it has great potential in optical material testing,optical manufacture,and optical alignment.