用于能动镜中的力驱动器采用直流电机作为驱动源,经减速器后利用滚珠丝杆传动加弹簧组件实现纳米级微位移,而采用丝杆副实现自锁。驱动器基于拉压力传感器实现闭环控制,高增益的PID控制器克服了机械摩擦的微动特性获得比较好的线性度。用4个力驱动器和3个刚性支撑组成了一个能动镜原型样机,光学干涉仪测量结果表明,力驱动器平均位移分辨力约为10 nm、最大可变形量达±8 μm、最大驱动力达±700 N。实验结果证明了力驱动器应用于能动镜驱动器的可行性,为能动镜的实用化提供了实验依据。

The force actuator developed for the active mirror uses DC-motor as driving source. Nanometer micro-displacement driving is achieved by means of gearbox,ball-screw-driven stage and groups of springs. Self-locking is performed by leading screw pair. The high gain PID controller based on pull-push force sensor in the feedback path can provide a sufficiently high loop gain to suppress effect of friction on micro-dynamic characteristics so that an excellent linearity is achieved. The actuators were tested in an active mirror prototype with four same actuators and three rigid supports. The measurement of micro-displacement was tested by an optical interferometer. The results of the prototype show that the average displacement resolution is 10 nm,max stroke is ±8 μm,max driving force is ±700 N. The experimental results show that the force actuator is suitable to drive an active mirror. This also provides basis for further optimization of actuator developed for active mirror.