光电工程, 2009, 36 (9): 41, 网络出版: 2010-01-31
微机械薄膜变形镜的闭环校正模型
Closed-loop Correction Model Based on Micromachine Membrane Deformable Mirror
自适应光学 微机械薄膜变形镜 面形影响函数 校正能力 校正模型 adaptive optics micromachine membrane deformable mirror figure influence function correction capability correction model
摘要
介绍了微机械薄膜变形镜(MMDM)面形影响函数的意义,并测量了Oko 公司37 通道MMDM 的面形影响函数矩阵,实验验证了镜面形变和单个驱动电极电压平方之间的线性关系,分析了变形镜的校正能力,建立了自适应光学系统闭环校正的模型。搭建基于MMDM 的自适应光学实验系统,采用人眼出射波前作为原始波前进行实验,结果表明,模型能快速有效的对动态畸变波前进行校正,为基于MMDM 的自适应光学系统提供了算法支持。
Abstract
The meaning of Micromachine Membrane Deformable Mirror (MMDM) figure influence function is discussed, and the figure influence function matrix of oko company 37-channel MMDM is measured. The linear relationship between the deformation of mirror surface and single actuator voltages square is experimentally verified. MMDM correction capability is analyzed and a closed-loop correction model of adaptive optical system is established. An adaptive optical experimental system based on MMDM is built. Moreover, wavefront from human eyes is used as the incident wavefront of adaptive optics system. Experimental results show that the model can correct dynamic distorted wavefront aberration rapidly and effectively, is very suitable for adaptive optical system based on MMDM.
李邦明, 廖文和, 沈建新, 梁春. 微机械薄膜变形镜的闭环校正模型[J]. 光电工程, 2009, 36(9): 41. 李邦明, 廖文和, 沈建新, 梁春. Closed-loop Correction Model Based on Micromachine Membrane Deformable Mirror[J]. Opto-Electronic Engineering, 2009, 36(9): 41.
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