介绍了一种准分子激光脉冲能量稳定系统。它由能量检测、开关电源和控制器组成。其组成部分均良好屏蔽,组件之间由光纤传递信息,通过均值算法进行脉冲-脉冲的放电电压调节,在闸流管放电的强电磁干扰条件下实现了可靠的闭环控制。该系统实验于一重复频率5 Hz,采用火花预电离的KrF激光器。在气体状态好的情况下,将脉冲能量波动相对标准差由4.71％降低至3.01％;在气体状态较差、放电电压较低的情况下,将脉冲能量波动相对标准差由7.18％降低至3.62％,有效地提高了脉冲能量的稳定性。

A closed-loop feedback system for excimer laser pulse energy stabilization was introduced,which included a pulse energy detecting part,a switching mode power supply and a controller. Each part of the system was well shielded and the signals between the parts were transmitted by fibers. With average algorithm of pulse-pulse discharge voltage,the reliable close-loop control can be realized under the condition of strong electromagnetic interference. Tested on a 5 Hz spark discharged KrF laser,the system effectively reduced the laser pulse energy fluctuations standard deviation from 4.71% to 3.01% with a gas fill in a sound situation and from 7.18% to 3.62% with the gas in a poor situation and low discharge voltage. The method can effectively improve the stability of pulse energy.