中国激光, 2010, 37 (2): 572, 网络出版: 2010-02-03
高功率激光器光学元件镀膜前后评价参数探讨
Study of the Evaluation Parameter of Optical Components before and after Coating in the High Power Laser System
表面光学 表面形貌 峰谷值 均方根 均方根梯度 功率谱密度 optics at surfaces surface profile peak to valley root mean square gradient of root mean square power spectral density
摘要
利用ZYGO Mark Ⅲ-GPI干涉仪对120 mm×88 mm元件镀膜前后进行了面形测量,获得了峰谷值(PV)和均方根梯度(GRMS),并对镀膜前后的PV,GRMS值进行了比较,发现镀膜后PV,GRMS值分别有所增加,同时对两者进行了线性拟合,结果表明两者在一定程度上存在着线性关系,并从理论上进行了模拟论证。同时对个别样品进行了功率谱密度(PSD)分析,发现镀膜后PSD曲线较镀膜前有所升高,这与基片的抛光程度以及镀膜过程有着密切联系。
Abstract
The surface figures of 120 mm×88 mm samples were measured by ZYGO Mark Ⅲ-GPI interferometer before and after coating. The analyzed of peak to valley (PV) and gradient of root mean square (GRMS) show that PV and GRMS increased,respectively,after deposition. At the same time,GRMS increased with the increase of PV,which also can be confirmed from the theoretical calculation. In addition,the power spectral density (PSD) of several samples are also shown. The results indicate that the curves ascend after coating,which relates closely with the substrate and deposition condition.
胡达飞, 邵淑英, 方明, 齐红基, 易葵. 高功率激光器光学元件镀膜前后评价参数探讨[J]. 中国激光, 2010, 37(2): 572. Hu Dafei, Shao Shuying, Fang Ming, Qi Hongji, Yi Kui. Study of the Evaluation Parameter of Optical Components before and after Coating in the High Power Laser System[J]. Chinese Journal of Lasers, 2010, 37(2): 572.
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