提出了一种改进型的可应用于微型光谱仪的光栅光调制器(GLM),器件由可动光栅和底层反射层组成。通过静电驱动由多个GLM组成的线阵单元,下拉栅条至不同高度可实现对不同波长光进行开关选通调制。介绍了该器件的工作原理、结构和工艺流程,利用Coventor软件对器件进行建模。通过有限元分析了器件的机电耦合特性,得到了器件的吸合电压和响应频率,并得出不同结构参数对器件栅条平坦度的影响关系。仿真结果表明:通过增加栅条厚度,改进底电极结构,且采用减薄的折叠型支撑梁,能够有效改善光栅面平坦度,使其较好地实现对光的开关选通。

A modified grating light modulator (GLM) device applied to novel micro-spectrometer is proposed,which consists of an upper movable grating and a bottom reflector. When the GLM array is actuated by different voltages,the movable gratings are pulled down to different height,which can modulate lights of different wavelengths. The operating principle,device architecture and fabricated process are introduced,and the device is modeled by using Coventor ware. The electromechanical coupling characteristic is analyzed by the finite element simulation method,the pull-in voltage and response frequency are deduced,and the influence relationship between device architecture and flatness of grating is discussed. The result indicates that flatness of grating can be optimized effectively to achieve better switching modulation feature by increasing the thickness,improving bottom electrode distribution and adopting thinning-folded-beam.