给出了一种新的极紫外(EUV)单色仪定标方法。通过测量标准气体He空阴极光源的30.38和58.43 nm两条发射光谱和标定过的中心波长为13.90 nm的Mo/Si多层膜反射镜的反射率峰值位置,对Mcpherson247型EUV单色仪进行波长定标,将所定的标准点在单色仪的运动轨迹上做了相应的标识,并用Origin软件进行处理,利用一元二次方程得出拟合曲线。对标定结果做了分析,得出了在12～60 nm波段内,用激光等离子体光源软X射线反射率计测量多层膜反射镜反射峰值位置时,测量准确度为0.08 nm,测量重复性为±0.04 nm。测量误差主要来源是光源的不稳定性和机械转动误差。

A new calibration method for Extreme Ultraviolet(EUV) monochromator was presented.By measuring the 30.38 nm and 58.43 nm lines of a standard He hollow cathode source and the reflectivity peak of a calibrated Mo/Si multilayer mirror with central wavelength of 13.90 nm,the wavelengths of Mcpherson247 EUV monochromator were calibrated.Then,the standard points on the track of monochromator was fitted to get parabolic curve by Origin.After analysing calibrated results,it shows that the measuring accuracy is 0.08 nm and the repeatability is ±0.04 nm,when the reflectivity peak of the multilayer mirror is measured using soft X-ray reflectometer with laser-produced plasma source at 12～60 nm.The main sources of measurement errors are the instability of the light source and the rotation error of the mechanism.