研究了激光共焦扫描显微镜(LSCM)在微结构分析中的应用,综述了该项应用的优势。LSCM的高分辨率和光强调节功能,使其可用于大角度测量;与图像处理系统相结合,便于微结构的定性和定量分析;而全自动样片台沿X轴和Y轴的自动扫描实现了图像的拼接功能。实验结果表明:运用LSCM测量的斜面最大角度至少可以达到50°;在悬臂梁的形貌分析中,可获得清晰的三维形貌,同时通过二维定量分析精确测得其形变为3.145μm;在100×物镜下,运用拼接功能获得384μm×288μm的视场面积,解决了高放大倍数下,在单帧显微图像中无法获取所观测对象全貌的问题。LSCM在微结构分析中的应用弥补了其它形貌分析设备测量功能上的不足,提升了微机电系统的测试水平。

An application of Laser Scanning Confocal Microscope (LSCM) in micro-structure analysis was discussed in order to enhance the analyzing and measuring levels of micro structure.LSCM could be used to measure large angle because of its high resolution and adjustable light intensity,and could analyze the micro structure by combining with picture disposal system qualitatively and quantitatively,also its full-automatic sample stand could automatically scan along X axis and Y axis to realize a picture mosaic.The experimental results indicate that the maximum slope angle measured by LSCM reaches at least 50°,and the clear three dimensional profile is obtained in the profile analysis of cantilever.Meanwhile,the deformation accurately measured by two dimensional quantitative analysis is 3.145 μm,and the field area is 384 μm×288 μm in mosaic function equipped with LSCM in 100× objective,which can solve the problem that the watched object's total shape in single frame micrographic image can not be obtained under high microscopic enlargement times.Experimental results show that the LSCM can make up for measuring functional deficiency of other profile analytic equipment and can improve the testing level of MEMS.