阐述半导体光电位置敏感器件(PSD)的横向光电效应,改进型2D-PSD的结构、特点、工作原理,在此基础上,提出一种新的电桥理论分析2D-PSD的中心与边缘产生非线性及其误差的原因。采用高精度低温漂高输入阻抗的前置放大器、加法器、减法器、除法器等元器件设计了一种改进型2D-PSD的信号调理电路,用于高精度的激光准直系统中。该信号调理电路将激光束经光学透镜、光阑、滤光器等光学元器件处理的光信号转换为电信号后,送入数据采集系统,利用直线度测评软件直接在计算机上将被测件的直线度测量显示。系统特点是:响应速度快;位置分辨率高;能实时检测等优点。最后给出测量实验结果和几个重要结论。

A new bridge theory is put forward to analyze the reason of nonlinearity errors caused by the center and edge of Two Dimensional Position Sensitive Detector (2D-PSD) on the basis of expounding the lateral photoeffect,the operating principle,architecture and characters of improved 2D-PSD.A signal processing circuit for improved 2D-PSD including high-precision,low temperature excursion and high input impedance preamplifier,summator,subtracter and divider is used in high-precision laser collimation system.The signal processing circuit converts the optical signals processed by optical system including optical lenses,diaphragm,light filter etc into electrical signals,and then the electrical signals will be sent into data acquisition system.The straightness measure results of work-piece will be showed on computer by the linearity evaluation software.The characters of the system are fast response,high-resolution position,real-time detection etc.In the end,measuring results and some important conclusions are presented.