光电工程, 2008, 35 (10): 12, 网络出版: 2010-03-01   

多层介质高反射膜的散射特性研究

Light Scattering Properties of Multilayer Dielectric High-reflection Films
作者单位
1 西安电子科技大学 理学院,西安 710071
2 西安工业大学 光电工程学院,西安 710032
摘要
为了研究多层介质高反射薄膜的散射特性减小光学薄膜的散射损耗,以多层光学薄膜矢量光散射理论为基础,利用光学薄膜的总散射损耗与光学薄膜双向反射分布函数的关系,研究了多层介质高反射薄膜分别在膜层界面粗糙度为完全相关和完全非相关模型下入射角和偏振状态对总散射损耗的影响,以及入射波长对总散射损耗的影响。理论研究结果表明,随着入射角的变化p偏振入射光引起的p偏振的总散射损耗强烈依赖于膜层界面粗糙度的相关特性,尤其是在布儒斯特角附近更为明显;此外,通过对介质高反射膜在两种不同模型下的总散射损耗随入射波长的变化与其反射率谱的比较发现,完全相关模型下的总散射损耗与反射率谱的变化趋势一致,完全非相关模型则恰好反之。
Abstract
In order to study light scattering and reduce scattering losses from multilayer dielectric high-reflection films,vector scattering theory and relationship of total scattering losses based on vector scattering theory and Bidirectional Reflectance Distribution Function(BRDF)were concisely presented.Total scattering losses changing with incidence angle and polarization from dielectric high-reflection multilayer films in fully correlated and uncorrelated model were researched,respectively.Furthermore,the influence of incident wavelength on light total scattering losses was analyzed.The theoretical results show that total scattering losses of p-polarized scattered light due to p-polarized incident light(Spp) strongly depend on the correlation between interfaces of multilayer films,especially near the Brewster angle.Moreover,total scattering losses changing with wavelength are consistent well with reflection spectrum of high-reflection multilayer films at fully correlated model.The result is reverse to uncorrelated model.

潘永强, 吴振森, 杭凌侠. 多层介质高反射膜的散射特性研究[J]. 光电工程, 2008, 35(10): 12. PAN Yong-qiang, WU Zhen-sen, HANG Ling-xia. Light Scattering Properties of Multilayer Dielectric High-reflection Films[J]. Opto-Electronic Engineering, 2008, 35(10): 12.

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