针对微透镜制作采用的球透镜研磨,多组分玻璃基板离子交换,结晶化玻璃基板光热法,本文提出非球面消球差双凸波导透镜设计、制备及参数测试方法。该方法根据集成光学原理,研制了一种非球面消球差双凸波导透镜。该透镜数值孔径大,放大倍数高,接近衍射极限,采用光刻、复制工艺,结构简单,一致性好。实验结果表明,NA=0.35,β=6.932,光强分布与理论值一致,达到设计要求。

In view of globe lens grinding,multi-component glass substrate ion exchange and crystallization of the glass substrate of light and heat,a method is proposed for designing,manufacturing aplanatic double-convex aspherical waveguide lens and testing its parameter.According to the method based on integrated optical principle,we develop a kind of optical aplanatic double-convex aspherical waveguide lens.It owns large numerical aperture,high magnification,simple structure and good consistency.Furthermore,the lens approaches to diffraction limit and uses light engraving and copying craft.The experimental results that NA= 0.35,β= 6.932 and light distribution corresponding with theoretical results meet the requirements of design.