为了设计可用于大幅面扫描的3维激光振镜扫描系统,深入研究了3维激光振镜扫描系统的动态响应性能及控制算法、校正算法,采用具有高响应性能的伺服机构作为系统的执行机构,合理地规划扫描路径以及扫描延时参量,设计了对扫描图形进行精确校正的扫描校正模型,开发出了一套能实现大幅面精确扫描的3维激光振镜扫描系统。该3维激光振镜扫描系统经过长期实验验证,运行稳定,其扫描重复定位精度不大于30μm,扫描精度可达100mm±0.1mm。结果表明,该3维激光振镜扫描系统在需要进行大幅面精确激光扫描行业中有重要应用价值。

In order to design a 3-D galvanometric scanner with a large working field,its dynamic response capability,control algorithm and calibration algorithm were studied in detail.After selecting a servo motor with high dynamic response as the executive unit of the scanner,optimizing the scanning path and delay parameters,a 3-D scanner was developed successfully.A precise calibration model was designed to calibrate the scan image.This set of scanner was validated with it running for a long time.The scanner worked stably with repeating location precision of ≤30μm and scanning precision of 100mm±0.1mm.The results show that the 3-D scanner has important application in large scanning fields.