为了解决迭代法在反演透明衬底透明膜找偏参量时的出错问题,采用理论与实验相结合的方法,对透明衬底透明膜椭偏数据处理进行了理论分析和实验验证,找到了当薄膜折射率接近衬底折射率时,椭偏数据反演就会出错的原因。据此提出了分段遍寻迭代搜索法,以LABVIEW为开发工具,成功设计和编写了相应的数据处理程序,最后对一些样品进行了实际测量反演并与文献结果作了比较。结果表明,该程序能正确反演透明衬底单层透明膜的参量,并具有反演速度快、精确度可达0.03nm、稳定性好等特点。

In order to solve the problem of the inversion ellipsometric parameter of transparent film on transparent substrate with iteration,the data processing method was analyzed in theory and verified in experiments.When the refractive index of film is closing to the refractive index of substrate,a mistake should happen in ellipsometric data inversion. According to the analysis,a new sub-iterative search method was presented to overcome the problem and a program of ellipsometric data processing was designed successfully with the tool of Labview.Finally,some of the samples were measured and the result was compared with those presented in some literature.The experimental results show that the ellipsometric parameter of single-layer transparent film on transparent substrate is computed successfully,and the inversion have the advantages of high stability,speed and precision of up to 0.03nm.