利用直流磁控溅射法在室温水冷玻璃衬底上制备出了可见光透过率高、电阻率低的掺钛氧化锌(ZnO:Ti)透明导电薄膜。SEM和XRD研究结果表明,ZnO:Ti薄膜为六角纤锌矿结构的多晶薄膜,且具有c轴择优取向。厚度为437 nm薄膜的电阻率为1.73×10-4 Ω·cm。所制备薄膜具有良好的附着性能,薄膜样品在500-800 nm的可见光平均透过率都超过了91％。

Transparent conducting titanium-doped zinc oxide films with high transparency and relatively low resistivity have been successfully prepared by DC magnetron sputtering at room temperature. SEM and XRD studies revealed that all the films were polycrystalline with a hexagonal structure and a preferred orientation along the c-axis. The resistivity achieved was 1.73×10-4 Ω·cm at a thickness of 437 nm.All the films present a high transmittance of above 91% in the visible range.