光子学报, 2009, 38 (1): 54, 网络出版: 2010-05-10
二维光子晶体的软平板印刷技术制作研究
Fabricating 2-D Polymer Photonic Crystals by Soft Lithography Technology
摘要
分析了软平板印刷技术制作二维光子晶体的特点和方法.利用绝缘PDMS模板，采用软平板印刷技术制造了三角晶系结构的二维聚合物光子晶体，采用同样的技术成功制成尺寸为150~500 nm，纵横比达1.25的高密度二维光子晶体.与其他制作技术相比，平板印刷技术具有大尺寸和易于制作的优点.结果表明，制作获得的微结构有很高的保真度.
Abstract
The characteristic and method of fabricating two-dimensional (2-D) polymer photonic crystals by soft lithography technology were analyzed.Using elastomeric polydimethysiloxane (PDMS) templates,two-dimensional polymer photonic crystals with triangular lattice structure were fabricated by soft lithography.And the high density two dimensional photonic crystal with feature sizes of 150~500 nm and aspect ratios of up to 1.25 were successfully replicated by the same method.Compared with other imprint technology,large field size and easy fabrication are two major advantages of soft lithography.Atomic Force Microscopy images show that the molded structures had high fidelity to the masters.
张飒飒, 王青圃, 张行愚, 连洁, 常军, 李岚, 陈佳琦, 王丽, 陈瑞曾. 二维光子晶体的软平板印刷技术制作研究[J]. 光子学报, 2009, 38(1): 54. ZHANG Sa-sa, WANG Qing-pu, ZHANG Xing-yu, LIAN Jie, CHANG Jun, LI Lan, CHEN Jia-qi, WANG Li, CHEN Rui-ceng. Fabricating 2-D Polymer Photonic Crystals by Soft Lithography Technology[J]. ACTA PHOTONICA SINICA, 2009, 38(1): 54.
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