光子学报, 2009, 38 (1): 99, 网络出版: 2010-05-10
基于157 nm激光制作的微光纤F-P折射率传感器
Optical Fiber F-P Refractive Index Sensor Based on 157 nm Laser Micromachining
导波光学 折射率传感器 光纤法珀腔 准分子激光微加工 Wave-guided optics Refractive index sensor Optical fiber F-P cavity Excimer laser micromachining
摘要
分析了157 nm激光制作的光纤法珀折射率传感器的传感特性.采用干涉条纹计数的方法对法珀腔的反射光谱进行解调,避免了光强波动的影响,同时具有较宽的折射率(RI)范围.在0~70℃范围内25 μm的法珀腔腔长变化量为6.25 nm,等效折射率变化为~2.46×10-4.常温下对折射率范围为1.33~1.427的甘油(丙三醇)溶液进行了测量,实验结果曲线的相关系数为0.9951,测量准确度为~3.70×10-4.
Abstract
The sensing characteristics of optical fiber F-P refractive index sensor produced by 157 nm excimer laser micromachining system in normal single-mode optical fiber was analysed.The reflective spectrum interferometic fringe count of this F-P sensor,which can avoid the fluctuation of optical power of the measurement system was employed,and it could lead to a large refractive index measurement range.The length variation of a F-P cavity with about 25 μm length is 6.25nm when the temperature varies from 0 ℃ to 70 ℃ ,which equates the refractive index variation of the cavity ~2.46×10-4 .The glycerin solution with the refractive index range of 1.33~1.427 was measured in normal temperature.The correlation coefficient of fitting curve of experiment results is 0.9951 and the resolution is ~2.46×10-4.
刘为俊, 饶云江, 冉曾令, 廖弦. 基于157 nm激光制作的微光纤F-P折射率传感器[J]. 光子学报, 2009, 38(1): 99. LIU Wei-jun, RAO Yun-jiang, RAN Zeng-ling, LIAO Xian. Optical Fiber F-P Refractive Index Sensor Based on 157 nm Laser Micromachining[J]. ACTA PHOTONICA SINICA, 2009, 38(1): 99.