光子学报, 2009, 38 (12): 3084, 网络出版: 2010-05-10
聚合物2×2定向耦合型电光开关
Polymer 2×2 Directional Coupler Electro-optic Switches
摘要
设计并制作了一种聚合物2×2定向耦合型电光开关.针对溶胶-凝胶法合成的有机/无机杂化电光材料膜厚较薄的情况,采用一种加载条形波导结构,利用掺有环氧丙脂的聚甲基丙烯酸甲脂-甲基丙烯酸缩水甘油脂作为引导层,在电光薄膜上构成定向耦合器,通过紫外光刻、反应离子刻蚀、电晕极化等工艺,制备了聚合物定向耦合型电光开关,并采用共面波导行波电极以电推挽方式工作.经测试,其器件损耗约为16 dB,开关电压9 V.
Abstract
The design and fabrication of a directional coupler electro-optic switches are presented.A strip-loading optical waveguide is proposed which uses organic/inorganic hybrid EO material,synthesized by sol/gel technique,as the active layer.Polymethyl-methacylate-glyciclyl-methacrylate(PMMA/GMA) with index regulator bis-A-epoxy,acting as the guiding waveguide,forms the coupler configuration.The device is fabricated by Corona poling,UV lithography and reactive ion etching method (RIE) process.A co-planar waveguide(CPW) electrode is adopted and the switches is working in electric push-pull way.The test results show that the device loss is about 16 dB,and a switching voltage of 9 V is observed.
孙小强, 高伟男, 孙杰, 高磊, 陈长鸣, 张大明, 刘式墉. 聚合物2×2定向耦合型电光开关[J]. 光子学报, 2009, 38(12): 3084. SUN Xiao-qiang, GAO Wei-nan, SUN Jie, GAO Lei, CHEN Chang-ming, ZHANG Da-ming, LIU Shi-yong. Polymer 2×2 Directional Coupler Electro-optic Switches[J]. ACTA PHOTONICA SINICA, 2009, 38(12): 3084.