应用光学, 2009, 30 (6): 992, 网络出版: 2010-05-10
干涉图的预处理技术研究
Investigation of interferogram pre-processing
干涉图处理 数学形态学 二维傅里叶变换 最小二乘法 interference image processing mathematical morphology 2-D FFT least square method
摘要
提出了一种干涉图预处理的新方法。该方法利用数学形态学的方法对干涉图进行有效区域的边缘提取,利用二维快速傅里叶变换迭代法对干涉图进行区域延拓,并采用非加权离散余弦变换最小二乘算法对干涉图进行波面统一,最终恢复出被测物体的表面面形,为后续结果分析奠定了基础。对一个实际SiO2薄膜样片进行了干涉图的预处理。结果表明,通过该算法得到的干涉图预处理结果,与Zygo干涉仪的分析测试结果基本一致。
Abstract
The modern interferometry measurment features high precision and non-contact, which makes it widely used. As an essential part of the measruement, apre-processing of interferogram was proposed, and it included edge identification based on mathematical morphology, regional extension based on 2-D fast fourier transformation (FFT), as well as unwrapped and wrapped phase based on non-weighted least square method for discrete cosine transform (DCT). At last, surface distribution was obtained. The image aquisition of the SiO2 film and the pre-processing of interferogram was performed.The result indicates that it is consistent with the result measured by Zygo interferometer.
葛锦蔓, 苏俊宏. 干涉图的预处理技术研究[J]. 应用光学, 2009, 30(6): 992. GE Jin-man, SU Jun-hong. Investigation of interferogram pre-processing[J]. Journal of Applied Optics, 2009, 30(6): 992.