提出一种新颖的基于光栅±1级干涉和相位载波(PGC)调制解调的光学加速度传感方案,并进行了样机制作和测试,其分辨率达到4×10-5gn量级以上,动态范围在光学结构中不受限制,仅与惯性传感中机械结构线性范围有关。与其他类型微加速度计相比,该光学加速度传感器不但在分辨率和动态范围上均获得较大的提高,而且利用光栅干涉进行加速度传感能很好地保证干涉的稳定性,从而提高工作稳定性,降低对安装精度的要求。该方案还可以应用到微电子机械系统(MEMS)技术中,为设计高分辨率大量程微光机电系统(MOEMS)型加速度计,提供了新的思路。

A novel optic accelerometer based on grating interference and phase generated carrier(PGC) modulation has been fabricated and tested. The reported prototype has sensitivity of above 4×10-5gn. Its dynamic range,which is relative with cantilevers of inertia system,is completely free from the limit of optical structure. In comparison with piezoelectricity and capacitive micro-electro-mechanical systems (MEMS) accelerometers,this device achieves an improvement both in resolution and dynamic range. Applying interference between ±1 refraction beams from a grating to acceleration sensing can also enhance stability and reduce the requirements on the installation of precision. The scheme proposed can also be applied to MEMS technique,which supplies a new thought for the design of high resolution and large dynamic range micro-opto-electromechanical systems (MOEMS) accelerometers.