光学学报, 2010, 30 (5): 1492, 网络出版: 2010-05-11
反射式非均匀掺杂负电子亲和光电阴极量子效率研究
Study on the Quantum Efficiency for Non-Uniform Doping Negative Electron Affinity Photocathode with Reflection Mode
光电子学 量子效率 非均匀掺杂 GaAs光电阴极 负电子亲和 optoelectronics quantum efficiency non-uniformly doping GaAs photocathode negative electron affinity (NEA)
摘要
内建电场对提高阴极量子效率有重要作用。为获得恒定的电场强度,需要用指数掺杂方式对光电阴极激活层进行掺杂。指数掺杂实际上是一种特殊的梯度掺杂,针对这种掺杂方式,建立了指数掺杂和均匀掺杂加权的量子效率公式。实验设计了4种掺杂浓度从1019-1018 cm-3掺杂样品,测量样品的光谱响应曲线和量子效率曲线,并分别用均匀掺杂量子效率公式,指数掺杂量子效率公式和新建立的梯度掺杂量子效率公式这三种方式,对量子效率曲线进行了拟合,证明了该量子效率公式具有较高的拟合精度。
Abstract
Built-in electronic field has important effect to improve the quantum efficiency of the photocathode. In order to get a stable electronic field,the exponential-doping method is applied in the active layer. Exponential doping actually is a special gradient doping,according to this consideration,a new quantum efficiency formula including uniform doping and exponential doping is brought forward. Four doping samples with concentration from 1019 to 1018 cm-3 are produced in the experiment,meanwhile their spectral response curves and quantum yield curves are detected. Through the data fitting analysis of the quantum yield curve with three methods which are uniformly-doping quantum yield formula fitting,exponential-doping quantum yield formula fitting and the new-built graded-doping quantum yield formula,the fitting precision of the new-built quantum yield formula is proved best.
傅江涛, 张松春, 常本康. 反射式非均匀掺杂负电子亲和光电阴极量子效率研究[J]. 光学学报, 2010, 30(5): 1492. Fu Jiangtao, Zhang Songchun, Chang Benkang. Study on the Quantum Efficiency for Non-Uniform Doping Negative Electron Affinity Photocathode with Reflection Mode[J]. Acta Optica Sinica, 2010, 30(5): 1492.