Chinese Optics Letters, 2010, 8 (s1): 29, Published Online: May. 14, 2010
Design of shallow-etched multilayer dielectric grating with –1st order high diffraction efficiency Download: 838次
多层介质膜光栅 浅刻蚀 粒子群优化算法 傅里叶模式方法 050.0050 Diffraction and gratings 050.1940 Diffraction 050.1950 Diffraction gratings 050.2770 Gratings 310.0310 Thin films
Abstract
A new design of shallow-etched multilayer dielectric grating (MDG) exhibiting a diffraction efficiency (DE) of approximately 100% in the –1st order at 1064-nm wavelength in Littrow mounting is reported. Particle swarm optimization algorithm and Fourier modal method are used to design MDG and calculate the DE of MDG. The thickness of the grating layer is less than 80 nm which is much shallower than that in the currently reported MDG design for a high DE, which is greatly helpful for the MDG etching process. Meanwhile, the bandwidth of DE which is more than 97.5% of MDG is 60 nm, and it is a meaningful result for MDG to be used in ultrashort pulse compression system.
Jianpeng Wang, Yunxia Jin, Shijie Liu, Jianda Shao, Zhengxiu Fan. Design of shallow-etched multilayer dielectric grating with –1st order high diffraction efficiency[J]. Chinese Optics Letters, 2010, 8(s1): 29.