Chinese Optics Letters, 2010, 8 (s1): 170, Published Online: May. 14, 2010  

Determination of fine layer structure in Ni/C multilayer using soft X-ray resonant reflectivity Download: 514次

Author Affiliations
1 Optical Films Technology R &
2 D Center, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Abstract
A fine layer structure in the Ni/C multilayer (3-4 nm/6-7 nm) is deposited by magnetic sputtering by combining soft X-ray resonant reflectivity curve at 4.48 nm and grazing incidence X-ray reflectivity (GIXR) curve at 0.14 nm. It is found that the thickness of Ni-on-C interface is much rougher than C-on-Ni interface. By analyzing the optical constants, it shows that the interface in the Ni/C multilayer that of system is a mixture of Ni and C atoms; the Ni and C in multilayer system have excellent stability, and no interlayer is formed.

Songwen Deng, Hongji Qi, Chaoyang Wei, Kui Yi, Zhengxiu Fan, Jianda Shao. Determination of fine layer structure in Ni/C multilayer using soft X-ray resonant reflectivity[J]. Chinese Optics Letters, 2010, 8(s1): 170.

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