Chinese Optics Letters, 2010, 8 (s1): 170, Published Online: May. 14, 2010
Determination of fine layer structure in Ni/C multilayer using soft X-ray resonant reflectivity Download: 514次
精细结构 X射线反射率 界面 340.7480 X-rays, soft x-rays, extreme ultraviolet (EUV) 340.7470 X-ray mirrors 310.6870 Thin films, other properties 310.4925 Other properties (stress, chemical,etc.) 160.4890 Organic materials
Abstract
A fine layer structure in the Ni/C multilayer (3-4 nm/6-7 nm) is deposited by magnetic sputtering by combining soft X-ray resonant reflectivity curve at 4.48 nm and grazing incidence X-ray reflectivity (GIXR) curve at 0.14 nm. It is found that the thickness of Ni-on-C interface is much rougher than C-on-Ni interface. By analyzing the optical constants, it shows that the interface in the Ni/C multilayer that of system is a mixture of Ni and C atoms; the Ni and C in multilayer system have excellent stability, and no interlayer is formed.
Songwen Deng, Hongji Qi, Chaoyang Wei, Kui Yi, Zhengxiu Fan, Jianda Shao. Determination of fine layer structure in Ni/C multilayer using soft X-ray resonant reflectivity[J]. Chinese Optics Letters, 2010, 8(s1): 170.