激光与光电子学进展, 2010, 47 (6): 062201, 网络出版: 2010-05-20   

高分辨率微通道板制造技术

Manufacture Technology of Microchannel Plate with High Resolution
作者单位
杭州千盟光电科技有限公司,浙江 富阳 311400
摘要
采用玻璃多纤维拉制(GMD)技术研制并批量生产了微小通道(孔径4-5 μm)还原铅硅酸盐玻璃微通道板(MCP),空间分辨率达到95 lp/mm。优选皮芯实体边玻璃组合,解决了小通道实体边MCP制板过程中发生变形、破裂的难题;开发新的拉丝设备和技术以及细小直径单纤维的排棒、复式纤维的排屏工艺和相应的技术设备,保证单复丝拉制过程中纤维的尺寸误差不大于0.5%,解决了MCP增益的均匀性难题,实现了两步法拉丝制作孔径5 μm以下MCP的工艺方法,制作的MCP平均孔径5 μm,厚度为0.25 mm,增益大于1×104 (900 V)。
Abstract
The reducing lead silicate glass microchannel plate (MCP) with 4-5 μm channel is produced by the glass multifiber draw (GMD) technology,and its resolution is 95 lp/mm. The crack and twist of MCP during production can be avoided by optimizing the glass group of the skin,core and solid border. The dimensional error of fiber is within 0.5% during fiber-drawing by developing new fiber-drawing machines and techniques,arranging slender-diameter mono-fiber and multi-fiber stick. By these ways,the problem of gaining uniformity of MCP is solved. MCPs with less than 5 μm channels were made by the method of two-step stick-drawing. The channel diameter of MCP is 5 μm,thickness is 0.25mm,and gain is 1×104 (900 V) on average.

陈楠, 乐务时, 龙高群, 姜盛军, 缪坤治. 高分辨率微通道板制造技术[J]. 激光与光电子学进展, 2010, 47(6): 062201. Chen Nan, Le Wushi, Long Gaoqun, Jiang Shengjun, Miao Kunzhi. Manufacture Technology of Microchannel Plate with High Resolution[J]. Laser & Optoelectronics Progress, 2010, 47(6): 062201.

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