傅里叶变换光谱仪(FTS)在光谱分析中的应用越来越广泛, 并且其微型化的趋势也愈加明显。 文章设计了一种新型空间调制微型傅里叶变换光谱仪。 在介绍其结构理论的基础上, 对其空间的光强分布进行了模拟, 通过对该结构下引起相位误差因素的详细分析, 采用改进的Mertz相位校正方法对小双边的采样数据进行了光谱复原, 其理论分辨率可达到3.43 nm@800 nm, 信噪比的理想分辨极限为6.8 dB。 该结构的微型FTS可以用微机械加工的方法来实现, 具有性能稳定, 误差容易校正等优点, 文章对空间调制微型傅里叶变换光谱仪的结构设计及仿真, 为微型FTS的微机械加工实验提供了理论支持, 还为微型傅里叶变换光谱仪的进一步应用提供了更广阔的空间。

Fourier transform spectrometer (FTS) is widely used in science and industry for the measurement of electromagnetic spectra, and it’s trend of minimization is particularly pronounced in many applications. A novel model of a micro FTS with no moving parts is proposed and analyzed. During the analysis, the gradients which mainly introduce the phase error are accounted for in details. Based on these assumptions and the improved Mertz phase correcting method, the spectrum of the signal is simulated, given the real extended light source. The resolution can reach 3.43 nm@800 nm, with high SNR limiting resolving ability 6.8 dB. The novel micro FTS could be made by MOEMS technology, which has some advantages over the conventional micro dispersive spectrometers based on the traditional technology, and this method can also afford some new concepts on the design of spectrometers. The research work is underway to demonstrate the theory.