通过EC法与FP法的混合定量分析方法, 建立了用于微球壳层掺杂元素含量测量的校准模型； 基于对微球直径、 PS、 PVA层厚度对分析元素荧光强度影响的理论计算及XRF实验研究, 将该模型用于ICF微球壳层掺溴含量的测量, 得到微球壳层掺溴含量较为精确的分析结果, 实验结果表明： XRF法测量ICF微球壳层掺溴含量具有较高的精度, 在微球涂层厚度大于10 μm时, 其测量相对误差在5％左右。

In inertial confinement fusion (ICF) physics experiment, the micro-shell that contains Br-doped CH coating must be characterized for doping Br concentration level. X-ray fluorescence (XRF), with its unique capability to quantitatively determine concentrations of most elements simultaneously and non-destructively, is generally the method of choice for total dopant (Z＞11) concentration. In the present paper, a method to determine the dopant concentration in ICF micro-shell coating with X-ray fluorescence spectrometry is described, and the calibration model is founded by the calculation of fluorescence intensity of film and micro-shell sample. Based on the calibration model, the fluorescence intensity vs concentration of Br-doped CH coating of micro-shell was obtained. The experiment result shows that X-ray fluorescence spectrometry is a nondestructive and accurate method of measurement of coating dopant in the inertial confinement fusion micro-shell sample, and the measuring error is about 5% for Br doped CH coating of micro-shells with 10 micron thickness coating.