红外, 2009, 30 (11): 7, 网络出版: 2010-05-26  

InGaAs短波红外探测器的偏振响应特性分析

Polarization-dependent Responsivity of InGaAs SWIR Photodetector
唐恒敬 1,2,*李永富 1,2朱耀明 1,2李淘 1,2李雪 1,2龚海梅 1,2
作者单位
1 中国科学院上海技术物理研究所,传感技术联合国家重点实验室,上海200083
2 中国科学院红外成像材料与器件重点实验室,上海200083
摘要
在偏振成像和激光功率测量技术领域,凡涉及偏振光的定量测量,都会由于光束的偏振态对探测器的影响而产生显著的误差。这种现象主要是由于许多类型的光探测器存在偏振敏感响应引起的。本文对光电探测器的偏振响应进行了分析,推导了光电探测器偏振相关损耗的斯托克斯模型。分析了SiNx 钝化膜对InGaAs 探测器偏振响应的影响。结果表明,无SiNx 钝化膜时,随着入射角度的增加,偏振响应损耗明显增加,而随着波长的增加,偏振响应损耗明显降低;采用SiNx 钝化膜时,随着波长的增加,偏振响应损耗先减小后增加。由于设计的SiNx 薄膜的增透中心波长为1550nm ,1310nm 波长处的偏振响应损耗大于1550nm 处的偏振响应损耗。
Abstract
In the field of polarization imaging and laser power measurement, an obvious error can be produced due to the effect of light polarization state on a photodetector in any polarization-dependent quantitative measurement. This phenomenon is mainly caused by the fact that many kinds of photodetectors are sensitive to light polarization. In this paper, the polarization-dependent responsivity (PDR) of a photodetector is analyzed, the stokes model of polarizatior叫ependent loss (PDL) is deduced and the effect of a SiNx passivation film on the PDR of an InGaAs photodetector is analyzed. The analysis result shows that when the SiNx passivation film is not used, the PDL increases with the increasing of an incident angle and decreases with the increasing of wavelength; and when the SiN x passivation film is used, the PDL 且rstly decreases and then increases with the increasing of wavelength. Because the central anti-refiection wavelength ofthe designed SiNx passivation film is at 1550nm, the PDL at the wavelength of 1310nr日is greater than that at the wavelength of 1550nm.

唐恒敬, 李永富, 朱耀明, 李淘, 李雪, 龚海梅. InGaAs短波红外探测器的偏振响应特性分析[J]. 红外, 2009, 30(11): 7. TANG Heng-jing, LI Yong-fu, ZHU Yao-ming, LI Tao, Li Xue, Gong Haimei. Polarization-dependent Responsivity of InGaAs SWIR Photodetector[J]. INFRARED, 2009, 30(11): 7.

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