提出一种二元光学元件微型芯模的工艺设计方法，该方法利用了数字调制器件(DMD芯片)的空间光调制特性。首先通过编程设计出二元光学器件的相关软件，以实现菲涅耳透镜、达曼光栅、龙基光栅等各种矢量图形，经过14倍精缩光学系统，将由DMD芯片生成的二元光学器件图像成像在涂有光刻胶的基板上。经显影、定影和坚膜后，再利用电化学蚀刻，得到一种二元光学阵列的微芯模。这种二元光学的芯模制作方法可以方便、高效、低成本地用于制作微光学器件。

Based on the spatial light modulation characteristics of digital micro-mirror device (DMD), a process design method for micro core mould of binary optical element (BOE) is proposed. A computer program was designed to simulate the vectograms of different BOEs such as Fresnel lens, Dammann grating, and Ronchi grating. The BOE pattern displayed on DMD was imaged on the substrate coated with photoresist by 14× reduction optical system, and the BOE mask can be obtained after development, fixation and electrochemical etching. By using DMD system, BOEs were fabricated with low cost and high efficiency, and fabrication parameters could be controlled，which were suitable for many optical systems.