应用光学, 2010, 31 (2): 317, 网络出版: 2010-05-31   

254nm低通滤光片的研制

Development of 254nm low-pass filter
作者单位
长春理工大学光电工程学院, 吉林 长春 130022
摘要
根据紫外光学系统的设计要求,在K9基底上研制了254nm高反射率、可见光谱区高透过率的低通滤光片。根据膜系设计理论,通过针法优化,获得了干涉型低通滤光片的膜系;对电子束蒸镀HfO2和MgF2材料进行了研究,解决了材料喷溅的问题,减少了薄膜的吸收;采用考夫曼离子源,通过优化工艺参数,提高膜层致密性,解决了光谱曲线漂移的问题,改善了成膜质量。
Abstract
According to the designed requirements of UV systems, a low-pass filter was studied and developed on K9 glass substrates with high reflectivity at 254nm and high transmittance in visible spectrum. According to the film designed theory, low-pass interference filter film was obtained by optimizing Needle method. The electron-beam evaporation materials of HfO2 and MgF2 were studied. The splash was solved and the absorption was decreased. By using Kaufman ion source, the film density was improved, the drift of spectral curves was solved and the quality of the film was improved by optimizing the process parameters.

张睿智, 付秀华, 牟光远, 唐吉龙. 254nm低通滤光片的研制[J]. 应用光学, 2010, 31(2): 317. ZHANG Rui-zhi, FU Xiu-hua, MU Guang-yuan, TANG Ji-long. Development of 254nm low-pass filter[J]. Journal of Applied Optics, 2010, 31(2): 317.

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