光学技术, 2007, 33 (3): 0447, 网络出版: 2010-06-03
一种可实现薄膜厚度在线测量的方法
An optical method of online measurement for the thickness of thin films
摘要
介绍了一种测量固体薄膜厚度的光学方法。该方法具有测量速度快、可实现在线测量等特点。为解决薄膜生产过程中厚度在线检测问题，构造了一套软硬件实验系统，利用该系统进行实验的结果表明：在10～100μm厚度范围，测量误差小于10%，满足实际生产需要。
Abstract
An optical method was introduced for measuring the thickness of solid thin films. This method is of high measuring speed,noncontact and online work. An experimental system was constructed for on-line measurement of the thickness of thin film. The experimental results show that the measuring error is lower than 10% in the range of 10～100μm,which fit the production need.
宋敏, 郑亚茹, 卢永军, 曲艳玲. 一种可实现薄膜厚度在线测量的方法[J]. 光学技术, 2007, 33(3): 0447. SONG Min, ZHENG Ya-ru, LU Yong-jun, QU Yan-ling. An optical method of online measurement for the thickness of thin films[J]. Optical Technique, 2007, 33(3): 0447.
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