光学技术, 2007, 33 (4): 0576, 网络出版: 2010-06-03
数字图像消卷积在显微测量中的应用
Microscopic measurement using deconvolution of digital images
摘要
研究了数字图像消卷积在显微测量中的应用。在测量系统点扩展函数的基础上,利用频谱空间变换消卷积图像处理方法,消除了传统光学显微成像中的几何不清晰度。通过对显微图像进行复原,实现了反射式一维线宽的显微精确测量。在医用接骨钢板表面质量的评价中,对10μm量级的划痕宽度实现了精确和方便的测量。该技术对相关计量技术的发展具有重要意义。
Abstract
Application of deconvolution of digital images in macroscopic measurement is studied. On the basis of measuring the point spread function of the system,a method of transformation of spectrum space is used in order to obtain clearer images,without the geometric blurring in traditional microscopy,and the width of one-dimensional line can be precisely measured. The technique is used to evaluate the surfaces of steel plates applied in osteopathy,and the scratches scaled in 10μm are measured accurately and easily. The technique makes great sense in the development of corresponding measurement.
杜华月, 顾济华, 杨勇, 钱湧. 数字图像消卷积在显微测量中的应用[J]. 光学技术, 2007, 33(4): 0576. DU Hua-yue, GU Ji-hua, YANG Yong, QIAN Yong. Microscopic measurement using deconvolution of digital images[J]. Optical Technique, 2007, 33(4): 0576.