由于加工超光滑表面的古典法对加工者的经验要求较高，而且不同的加工者对抛光时间长短的控制也有较大的差别，因而下盘时机的准确判断将会对超光滑表面的加工质量产生严重的影响。为此，对所加工的全反射棱镜的超光滑表面抛光不同的时间，并在全反射条件下，根据全反射棱镜背向散射光斑的大小和亮暗的程度来判断所加工超光滑表面加工质量的检测方法，最终给出超光滑表面的抛光质量随抛光时间的变化。在实验结果的基础上得出了抛光质量随抛光时间交替变化的基本规律，并根据加工经验总结出了超光滑表面加工过程中的注意事项和判断下盘时机的基本方法。

Since the classical polishing method to polish ultra-smooth surface requests much experience form workers and each worker has different understanding on polishing time,the accurate control of polishing time decides the processing quality of ultra-smooth surface. Therefore,a series of experiments on polishing quality of an ultra-smooth surface and polishing time were designed,which was judged according to the size of a scattering facula and luminance under the condition of total reflection. Finally,the variation of the polishing quality of ultrasmooth surfaces with polishing time is presented. It is concluded that the processing quality of ultra-smooth surfaces is affected by the change of polishing time. Some techniques for the polishing process and the criteria to assess the polishing quality were summarized.