Chinese Optics Letters, 2010, 8 (6): 621, Published Online: Jun. 22, 2010
Experimental study of sweep control in e-beam evaporated optical coatings Download: 683次
薄膜制备 扫描控制 扫描路径设计 310.1860 Deposition and fabrication 120.4640 Optical instruments 160.4670 Optical materials
Abstract
High performance optical coating requires excellent uniformity of thin-film. Keeping the surface of evaporation material flat is propitious for the stability of vapor plume, and can improve the uniformity of thin-film. Based on the principle of electron beam spot sweep, a pattern controller in domestic coater is designed. For the purpose of even evaporation during auto-sweep, the influence of the depth of material surface in the crucible on the evaporation characteristic is considered. Pre-melting and evaporation experiments are performed on melting material (Ti3O5), subliming material (SiO2), and semi-melting, semi-subliming material (HfO2). The sweeping experimental results show that using the designed sweep controller can make good performance on evaporation and pre-melting for the above materials.
Ning Wang, Jianda Shao, Kui Yi, Chaoyang Wei. Experimental study of sweep control in e-beam evaporated optical coatings[J]. Chinese Optics Letters, 2010, 8(6): 621.