通过溶胶凝胶法和旋涂法成功制备了多种金属离子掺杂的介孔TiO2薄膜材料。小角X射线衍射谱和TEM测试结果表明Zn2+,Fe3+,Y3+掺杂的TiO2薄膜均具有较有序的介孔结构;掺入Zn2+,Fe3+的介孔TiO2薄膜孔径为7-9 nm,掺入Y3+离子后介孔孔径扩大至10.9 nm。通过透射光谱研究了三种离子掺杂对介孔TiO2薄膜光学性能的影响,并用Swanepoel包络法拟合了薄膜的折射率。结果表明,掺入Fe3+后,介孔TiO2薄膜光吸收带明显展宽,且具有丰富的表面能态;Y3+掺杂能抑制介孔TiO2纳米晶生长,有助于得到较大孔径的介孔TiO2薄膜。

Ion-doped mesoporous TiO2 thin films with regular mesoporous structure ware successfully prepared through the sol-gel method and spin-coating. The Zn2+,Fe3+-doped TiO2 thin films exhibit mesoporous structure with pore size of 7-9 nm,and the Y3+-doped TiO2 thin films exhibit mesoporous structure with larger pore size of 10.9 nm,which characterized by small angle X-ray diffraction patterns and TEM photographs. Optical properties were studied through the thin film transmission spectra of three kind of metal-doped mesoporous TiO2 thin films,and the refractive index of the films were fitted by Swanepoel envelope method. It can be found that after doping with Fe3+,optical absorption edge of mesoporous TiO2 thin-films was obviously broadened;and Y3+ dopants protects the collapse of mesoporous structure from the excessive growth of TiO2 nanocrystalline,offering a help to obtain mesoporous thin-films with large pore size.