自行研制紫外微加工系统，系统有效工作范围120mm×120mm，最小加工线宽80μm，系统操作简单、运行稳定高效。实验中完成对Nd∶YAG紫外激光器、XY扫描振镜以及F－Theta平场透镜设计。实现波长355nm紫外激光最高平均功率2．13W稳定输出，1h内输出功率波动小于7%；XY振镜最大扫描角度士28°，线性响应速度0．35～0．5ms；F－Theta视场角为士25°，有效焦距为250mm。最后对系统存在的问题进行了分析。

The ultraviolet laser micro-processing system was self-developed. Effective working area of the system was 120 mm x120 mm and its minimum linewidth was 80 μm. The Nd∶YAG ultraviolet laser,XY shake lens and F-Theta lens were designed,and ultraviolet laser in 355 nm with maximum average output power of 2.13 W was achieved with the power fluctuation less than 7% in 1 h. The maximum scan angle of XY shake lens was ±28°,and response speed was less than 0.35～0.5 ms. The field angle of the F-Theta lens was ±25°,and focal length was 250 mm. In the end,some problem in the system was analyzed.