为实现对F-P腔腔长的控制,设计了F-P腔腔长锁定控制系统。该系统以633nm稳频激光作为基准光源,通过控制系统驱动压电陶瓷调节F-P腔的腔长,以实现将F-P腔的谐振频率锁定到基准光源的频率上。实验结果表明,该方案切实可行,锁定后的F-P腔腔长的不确定度可达10-10量级。该方法在原子沉积技术中对于实现沉积台的稳定具有重要的指导意义。

A program is presented to achive the F-P cavity lenth control. According to the first harmonic phase theory and making the frequency of the stabilized laser as a reference, this method can adjust the F-P cavity length by driving peizoelectric ceramic though the control system. The experiment shows that the program is feasible and the length uncertainty of F-P cavity can reach the order of the uncertainty. It has the important guiding significance to realize the stability of deposition setup in atom lithograpy.