介绍了一种基于热释电探头的准分子激光能量检测系统,实现了对 0～200 Hz重复率运行的准分子激光单个脉冲及 多脉冲系列的能量实时检测。它由探头、放大、峰值保持、MCU、显示和通讯几部分组成,解决了闸流管放电强电磁干扰等 难点,并在193 nmArF和248 nmKrF准分子激光器上进行了测试:响应时间4 ms、分辨率10 μJ、灵敏度0.5 V/mJ、精度±3%。 本系统既可作为能量计使用,也可以作为检测环节用于脉冲能量闭环稳定系统中,如采用响应速度更高的光电管, 有望实现高重复率准分子激光光源的实时脉冲能量检测和稳定等技术。

An excimer laser pulse energy detection system was introduced, which is able to pick out either a single pulse energy or the individual energy of a desired series of pulses during the laser runs in a pulse repetition mode up to 200 Hz. By use of a pyroelectric detector as energy sensor the system consists of amplifiers, peak-holding circuits, MCU, display and communication interface. Owing to an excellent interference suppressor circuit design the system runs well even if the thyratron discharging EMI is very strong. Testing on the 193 nm ArF and 248 nm KrF excimer laser, response time of 4 ms, power resolution of 10 μJ, sensitivity of 0.5 V/mJ and power accuracy of ±3% are achieved. This system can be used as an energy-meter alone or as a real time detector in a closed feedback loop for laser pulse energy stabilization. After substituting the pyroelectric detector with a photomultiplier tube, it is expected that the system can be suitable for repetition rate higher than 1 kHz.