以纳米氧化锡(SnO₂)粉末为原料,有机溶剂为载体,配置了SnO₂浆料,通过激光微熔覆技术在氧化铝基板上制备了SnO₂气敏膜。采用X射线衍射(XRD)和场发射扫描式电子显微镜(FE-SEM)分析研究了激光功率对SnO₂气敏膜微观结构和气敏特性的影响规律。实验表明,随着激光功率的升高,纳米SnO₂的晶粒逐渐长大,气敏膜对乙醇气体的灵敏度逐渐降低;激光微熔覆制备的气敏膜对体积分数为2×10-3乙醇气体的灵敏度最高达到8.6,与传统丝网印刷工艺制备的气敏膜性能相当。

SnO₂ gas-sensing film is prepared on alumina substrate by laser micro-cladding SnO₂ paste,which is obtained by mixing SnO₂ nanoparticles with organic solvent. The effect of laser power on microstructure and gas-sensing properties of gas-sensing film are researched by X-ray diffraction (XRD) and field scanning electron microscope (FE-SEM). The results show that the grain sizes of SnO₂ film gradually increase with raising laser power,while gas sensitivity to ethanol vapor decreases steadily. The gas sensitivity to 2×10-3 ethanol vapor of gas-sensing film fabricated by laser micro-cladding reaches a maximum value of 8.6,whose performance is equivalent to traditional screen-printed gas-sensing film.