利用电子束直写系统(EBL)和反应离子束刻蚀系统(RIE)制作了两级正交偶极分形槽样品,其中空气槽的宽度为0.12 μm,两级正交偶极分形槽结构中第一级和第二级的臂长分别为1.8 μm 和0.8 μm。样品总体尺寸为35 μm×35 μm,是由20×20个正交偶极排列而成的,每个正交偶极之间的周期为1.5 μm。采用实验和传输矩阵(TMM)理论模拟的方法研究了分形槽结构在近红外和中红外波段的透射曲线,正交偶极分形槽结构在1.7 μm和5.2 μm波长处得到两个增强透射峰,其透射率分别为36%和49%。理论模拟结果与实验测量结果基本一致。证明了两级正交偶极分形结构中自相似性的存在。

Two-stage cross dipole fractal slits are sample is fabricated by electron beam lithography (EBL) and reactive ion etching (RIE) system,and the width of the fractal slits is about 0.12 μm.The primary and secondary cross dipole arm lengths of the fractal unit are 1.8 μm and 0.8 μm,respectively.The overall size of the sample used in the experiment is 35 μm×35 μm,which is composed of 20×20 periodic array of two-stage cross dipole fractals.The period of the fractal lattice is 1.5 μm.The transmission spectrum of the two stages cross dipole fractal slits is simulated using the transfer-matrix method (TMM) in the near- and mid-infrared region.There are two enhanced transmission peaks at 1.7 μm and 5.2 μm with the transmission coefficient of 36% and 49%.The measured transmission spectrum agrees well with the simulation.